ProQuest www.csa.com
 
 
RefWorks
  
Discovery Guides Areas
>
>
>
>
>
 
  
e-Journal

 

MicroElectroMechanical Systems (MEMS)
(Released October 2001)

 
  by Salvatore A. Vittorio  

Review

Key Citations

Web Sites

Glossary

Conferences

Editor
 
Web Sites
  1. The Beginner's Guide to MEMS Processing
    (MEMSnet Corporation for National Research Initiatives, Reston, VA)

  2. Carnegie Mellon High-Aspect-Ratio Integrated CMOS-MEMS Process
    (Carnegie Mellon University, Pittsburgh, PA)

  3. Current Challenges
    (MEMSnet Corporation for National Research Initiatives, Reston, VA)

  4. Intelligent Microsystem Center
    (Intelligent Microsystem Center, Seoul, Korea)

  5. LIGA
    (Sandia National Laboratories, Albuquerque, NM)

  6. MEMS Research: Yogesh B. Gianchandani
    (University of Wisconsin, Madison, Wisconsin)

  7. MEMS Based Active Stabilization of Structures
    (Xerox Corporation, Palo Alto Research Center (PARC), Palo Alto, CA)

  8. MEMS Microphone Technology
    (Defense Advanced Research Products Agency (DARPA), Arlington, VA)

  9. MEMS, Smart Research Matter at Park
    (Xerox Corporation, Palo Alto Research Center (PARC), Palo Alto, CA)

  10. MEMSweb Publications Database
    (University of Colorado, Boulder, Colorado)

  11. Microelectromechanical Systems Laboratory
    (Carnegie Mellon University, Pittsburgh, PA)

  12. Nature-Inspired Acoustic Sensor Systems
    (Defense Advanced Research Products Agency (DARPA), Arlington, VA)

  13. Noise Control and Noise Cancellation
    (Defense Advanced Research Products Agency (DARPA), Arlington, VA)

  14. Online Presentation: Introduction to MEMS (Powerpoint)
    (University of Colorado, Boulder, Colorado)

  15. Polysilicon LPCVD Tube
    (University of Wisconsin, Madison, Wisconsin)

  16. Sensor Arrays, Distributed Sensors and Applications
    (Defense Advanced Research Products Agency (DARPA), Arlington, VA)

  17. What Are MEMS?
    (University of Colorado, Boulder, Colorado)

  18. What Is MEMS Technology?
    (MEMSnet Corporation for National Research Initiatives, Reston, VA)