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The Beginner's Guide to MEMS Processing
(MEMSnet Corporation for National Research Initiatives, Reston, VA)
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Carnegie Mellon High-Aspect-Ratio Integrated CMOS-MEMS
Process
(Carnegie Mellon University, Pittsburgh, PA)
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Current Challenges
(MEMSnet Corporation for National Research Initiatives, Reston, VA)
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Intelligent Microsystem Center
(Intelligent Microsystem Center, Seoul, Korea)
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LIGA
(Sandia National Laboratories, Albuquerque, NM)
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MEMS Research: Yogesh B. Gianchandani
(University of Wisconsin, Madison, Wisconsin)
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MEMS Based Active Stabilization of Structures
(Xerox Corporation, Palo Alto Research Center (PARC), Palo Alto, CA)
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MEMS Microphone Technology
(Defense Advanced Research Products Agency (DARPA), Arlington, VA)
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MEMS, Smart Research Matter at Park
(Xerox Corporation, Palo Alto Research Center (PARC), Palo Alto, CA)
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MEMSweb Publications Database
(University of Colorado, Boulder, Colorado)
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Microelectromechanical Systems Laboratory
(Carnegie Mellon University, Pittsburgh, PA)
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Nature-Inspired Acoustic Sensor Systems
(Defense Advanced Research Products Agency (DARPA), Arlington, VA)
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Noise Control and Noise Cancellation
(Defense Advanced Research Products Agency (DARPA), Arlington, VA)
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Online Presentation: Introduction to MEMS (Powerpoint)
(University of Colorado, Boulder, Colorado)
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Polysilicon LPCVD Tube
(University of Wisconsin, Madison, Wisconsin)
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Sensor Arrays, Distributed Sensors and Applications
(Defense Advanced Research Products Agency (DARPA), Arlington, VA)
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What Are MEMS?
(University of Colorado, Boulder, Colorado)
- What Is
MEMS Technology?
(MEMSnet Corporation for National Research Initiatives, Reston,
VA)
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